Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

Run-to-Run Control in Semiconductor Manufacturing

Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes

Run-to Run (RtR) control plays an important role in semiconductor manufacturing. In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoid approximation are compared with other RtR controllers by simulation according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as process drifts, process shif...

A batch-based run-to-run process control scheme for semiconductor manufacturing

Run-to-Run (R2R) control has been widely used in semiconductor manufacturing to compensate for process disturbance and to improve quality. The traditional R2R controller only takes the process output in a previous run as its input and generates an optimal recipe for the next run. In a multistage semiconductor manufacturing process, variations in upstream stations are propagated to downstream st...

Run-to-run Control of Membrane Filtration Processes

Membrane ltration processes are often operated cyclically, where one cycle comprises a ltration and a backwashing phase. Due to the complex mechanisms involved, these ltration processes are mostly operated with xed values of the manipulated variables. In this paper, a model-based process control approach is introduced, which is based upon run-to-run control theory. To evaluate the controller, a...

Nonlinear Run-to-Run Controller for Semiconductor Manufacturing

Run-to-run control is a generic methodology in control of semiconductor manufacturing processes. It is a model based process control strategy whereby process inputs (recipes) are adjusted on a run-to-run basis in response to measurements (responses) of process state variables. It updates the recipes of the process at the beginning of each run. In semiconductor manufacturing, many processes are ...